FFC300-101A |
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Film Frame (Dicing) Cassettes |
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Entegris' 300 mm film frame cassette is SEMI® G74-0699 compliant and ergonomic in design to minimize Environment, Safety and Health (ESH) issues surrounding the handling and transport of 300 mm wafers mounted to film frame. The cassette accommodates up to 13 wafers / film frames and utilizes industry standard interface features for maximum automation compatibility. When used with Entegris' 300 mm plastic film frame, with wafers mounted, the cassette provides exceptional ESH benefits. Cassettes are available for 300 mm film frames. |
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