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200mm Storage Boxes
HA200-0005
200mm Storage Boxes
200mm Storage Boxes
•Automation compatible
•Five degree wafer tilt minimizes wafer chatter
•Single carrier capacity
•Accommodates select 25-capacity carriers, excluding wide-flange carriers
•EMSTAT™ AR base with EMSTAT™ AR, EMSTAT™ AR+ or polycarbonate cover options
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